High Vacuum Molecular Pump

High Vacuum Molecular Pump

The turbo molecular pump is a mechanical vacuum pump with a rotor manufactured of a quick rotating turbine blade&comma helical groove&comma or a blend of the two&period The gas molecules enter the turbo molecular pump and collide with the surface of the rotors generating kinetic vitality causing the fuel molecules to go toward the turbomolecular pump exhaust&period

The pumps offer you total magnetic levitation rotor&comma which provides a clear&comma dependable vacuum for modern semiconductor and photo voltaic industries&period of time It features a 5 axis magnetic bearing and 50 percent rack controller demanding no tuning or battery backup&comma higher compression&comma and corrosion resistant&time period

Design F-250&sol1500 FF-250&sol1600 F-250&sol1800
Ability&lparl&sols&rpar 1500 1600 1800
H2 Compression Ratio 3× ten three 3× 10 three 3× ten three
N2 Compression Ratio 1× ten eight 1× 10 eight 1× ten 8
Greatest Force&lparPa&rpar ≤ 6× ten -6 ≤ 1× ten -six ≤ 1× 10 -6
Rotation Speed&lparRPM&rpar 21000 27000 27000
Run up time&lparmin&rpar < 8 < 8 < 8
Outlet Flange KF50&lparDN50 ISO-KF&rpar KF50&lparDN50 ISO-KF&rpar KF40&lparDN40 ISO-KF&rpar
Inlet Flange LF250&lparDN250 ISO-K&rpar                        LF250&lparDN250 ISO-K&rpar                          LF250&lparDN250 ISO-K&rpar 
Bearing CZPT Ceramic bearing Ceramic bearing
Backing pump&lparl&sols&rpar fifteen fifteen fifteen
CZPT drinking water&lparº C&rpar ≤ twenty five ≤ twenty five ≤ 25
Heating T&lparº C&rpar ≤ 100 ≤ one hundred ≤ one hundred
Ambient T&lparº C&rpar five~forty 5~forty 5~40
Oil stuffed&lparml&rpar 150 one hundred fifty Grease lubricated
Install CZPTation vertical&pm 5° vertical&pm 5º any
Weight&lparkg&rpar sixty 47 forty two

High Vacuum Molecular Pump