The turbo molecular pump is a mechanical vacuum pump with a rotor manufactured of a quick rotating turbine blade&comma helical groove&comma or a blend of the two&period The gas molecules enter the turbo molecular pump and collide with the surface of the rotors generating kinetic vitality causing the fuel molecules to go toward the turbomolecular pump exhaust&period
The pumps offer you total magnetic levitation rotor&comma which provides a clear&comma dependable vacuum for modern semiconductor and photo voltaic industries&period of time It features a 5 axis magnetic bearing and 50 percent rack controller demanding no tuning or battery backup&comma higher compression&comma and corrosion resistant&time period
Design | F-250&sol1500 | FF-250&sol1600 | F-250&sol1800 |
Ability&lparl&sols&rpar | 1500 | 1600 | 1800 |
H2 Compression Ratio | 3× ten three | 3× 10 three | 3× ten three |
N2 Compression Ratio | 1× ten eight | 1× 10 eight | 1× ten 8 |
Greatest Force&lparPa&rpar | ≤ 6× ten -6 | ≤ 1× ten -six | ≤ 1× 10 -6 |
Rotation Speed&lparRPM&rpar | 21000 | 27000 | 27000 |
Run up time&lparmin&rpar | < 8 | < 8 | < 8 |
Outlet Flange | KF50&lparDN50 ISO-KF&rpar | KF50&lparDN50 ISO-KF&rpar | KF40&lparDN40 ISO-KF&rpar |
Inlet Flange | LF250&lparDN250 ISO-K&rpar | LF250&lparDN250 ISO-K&rpar | LF250&lparDN250 ISO-K&rpar |
Bearing | CZPT | Ceramic bearing | Ceramic bearing |
Backing pump&lparl&sols&rpar | fifteen | fifteen | fifteen |
CZPT drinking water&lparº C&rpar | ≤ twenty five | ≤ twenty five | ≤ 25 |
Heating T&lparº C&rpar | ≤ 100 | ≤ one hundred | ≤ one hundred |
Ambient T&lparº C&rpar | five~forty | 5~forty | 5~40 |
Oil stuffed&lparml&rpar | 150 | one hundred fifty | Grease lubricated |
Install CZPTation | vertical&pm 5° | vertical&pm 5º | any |
Weight&lparkg&rpar | sixty | 47 | forty two |